Large-scale autonomous spin coater
Supports large substrates! An active standalone spin coater suitable for research and experiments.
The active spin coater can accommodate large substrates. As the substrate size (cup diameter) increases, the size and weight of the equipment also increase. When placed on a tabletop, the working height can become inconvenient, so it is designed as a freestanding unit. The freestanding type has casters that touch the ground when the adjusters are shortened, making it easy to move. Like the tabletop spin coater with a smaller substrate size (cup diameter), it is equipped with a safety cover with an interlock sensor and an interlock for substrate suction pressure for safety measures. The ACT-700AII (cup diameter 700) can spin coat substrates up to φ500mm (□360mm), but we can also manufacture spin coaters that accommodate larger substrate sizes. For example, we have successfully produced a spin coater with a cup size of φ1800mm to address the challenge of spin coating a □1000mm substrate. Please feel free to consult us. 【Features】 - Widely compatible from research to production - Equipped with 10-step, 100-pattern program memory - Standard emergency stop button - Supports development and evaluation using various solutions *For more details, please download the PDF or contact us.
- Company:アクティブ
- Price:5 million yen-10 million yen